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Introduction |
- SiC coated Graphite heater |
SiC coated Graphite heater is constructed
from high quality, high-density graphite, coated
with silicon carbide(SiC).
This heater is available for an oxygen environment. |
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- SiC uniform heater |
SiC uniform heater is a substrate uniform heater
utilizing a SiC sintered body as a heating element,
which is high dense and has high electrical conductivity,
made of super fine powder of high-purity
SiC produced by the plasma CVD method.
Hihgly Oxygen Resistant SiC uniform heater has proven
to operate at 10 Torr of oxygen partial pressure
with long time (900°C, 1,000 hours). |
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- Specially, due to low outgassing, SiC heaters(SiC coated &SiC
unform) are useful to heating unit for the UHV Systems.
So, we recommend the SiC heater for the cleanness and
contamination free process. |
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Features |
- Heating, rotation and Z-motion drive units are all available for substrates ranging from 2” to 12” in diameter. |
- Temperature Uniformity : 900ºC ±5ºC for a 300 mm Si wafer |
- For uniform sample deposition the substrate can be rotated with a Ferrofluidics rotary feedthrough drive mechanism. |
- A computer-controlled drive system provides variable rotational speeds from 1 through 60 rpm. |
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