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A evaporator uses an electric resistance heater or high-energy beam to melt the material and
raise its vapor pressure to a useful range. This is done in a high vacuum, both to allow
the vapor to reach the substrate without reacting with or scattering against other gas-phase
atoms in the chamber, and reduce the incorporation of impurities of from the residual gas
in the vacuum chamber. Our evaporation system is capable of fabricating multi-layer
thin films by applying co-deposition system. Also, Arc-suppression E-beam Evaporator can be
operated at the pressure of 5x10-3 Torr and up. |
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