• PVD (Physical Vapor Deposition)
›
Evaporator
- Thermal Evaporator
- E-beam Evaporator
- Ion Beam Assisted Deposition
- Arc Suppression E-beam Evaporator
- Pulsed Laser Deposition
›
Sputter
- RF & DC Magnetron
- Ion Beam Sputter
- UHV Sputter
- In Line Sputter
- Bench Top Sputter
•
Solar Cell
• CVD (Chemical Vapor Deposition)
›
PECVD
•
RTP (Rapid Thermal Process)
• Etcher
›
ICP (Inductively Coupled Plasma)
›
RIE (Reactive Ion Etching)
›
CAIBE (Chemically
Assisted Ion Beam Etching)
•
Atmospheric Plasma
•
Vacuum Dryer
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