RMvac

• PVD (Physical Vapor Deposition)

- Thermal Evaporator
- E-beam Evaporator
- Ion Beam Assisted Deposition
- Arc Suppression E-beam Evaporator
- Pulsed Laser Deposition

› Sputter

- RF & DC Magnetron
- Ion Beam Sputter
- UHV Sputter
- In Line Sputter
- Bench Top Sputter

• Solar Cell

• CVD (Chemical Vapor Deposition)

› PECVD

• RTP (Rapid Thermal Process)

• Etcher

› ICP (Inductively Coupled Plasma)

› RIE (Reactive Ion Etching)

› CAIBE (Chemically
Assisted Ion Beam Etching)

• Atmospheric Plasma

• Vacuum Dryer

home > product > PVD (Physical Vapor Deposition) > Sputter > Bench Top Sputter

Intesi series

Introduction

Rocky Mountain Vacuum Tech, Inc.has developed
a revolutionary new Bench Top Sputtering
System capable of operating in relatively high
partial pressure conditions (10-30 m Torr) making
it extreamly suitable for SEM applications.
The Rocky Mountain Vacuum Tech, Inc.
Intelsi Series 'Bench Top' Sputter Coating
System is ideally suited for coating
of SEM samples as well as all other small
sample-sized substrates. Ease of operation is
facilitated by a fully automated touch screen control panel.

Features
• Extremely versitile • High capacity vacuum pumping • Fully automated PLC control for ease of operation • Capable of producing very thin resultant films • Suitable for reactive gas deposition (O2, N2, Ar, etc.)
Benefits
• Easy to operate • No cooling required • Precise reproducible coatings • Fully adaptable to a wide range of specimens • Compact bench top design • Easy loading and unloading of specimens
Applications
• Gold coating for SEM • Metal Deposition such as Al, Au and so on • Oxide film Deposition Such as ZnO and SiO2 (use with RF power)

Specifications

Model	Intelsi - S	Intelsi - ST
System Dimensions	500mm(W) x 550mm(D) x 430mm(H)
Weight	40kg
Electrical / Air	110V/220V, Single Phase, 50/60Hz / 6-7kg/cm²
Target Size	2” Dia.
Pumping Capability	Rotary Pump(150 l/min)	Rotary Pump(150 l/min) & Turbo Molecular Pump(60 l/s for N2)
Gas Supply Unit	Flow meter & valve
Power	DC power supply
Ultimate Pressure	Below than 5 x 10^-7 Torr	Below than 5 x 10^-6 Torr
Operation	Auto pumping, auto process and auto vent using PLC & touch panel
Vacuum Gauge(Reading Range)	ATM-10^-3 Torr	ATM-10^-10 Torr
Throttle Valve		On/Off type
Optional Goods	Substrate rotation & z-motion, Substrate Heating, MFC RF power supply, Quartz crystal thickness monitor

Intelsi-T Series
The Intelsi-T combines advantages of large evaporation systems (e.g. optimum sample to source
working distance, ability to adjust evaporation angle) with the benefits of compact systems
(small footprint, rapid pumping, easy to use and maintain).

Intelsi-A Series
The Intelsi-A combines advantages of large Ashing system with benefits of compact systems.
(Substrate vias type, Reactive ion type, Surface treatment, Surface Cleaning)